Semiconductor 2.0 Era: The Reliability Revolution of Advanced Ceramics

Advanced ceramics, due to their exceptional high-temperature stability, low thermal expansion coefficient, high hardness and resistance to plasma corrosion, have become the core material for semiconductor manufacturing. Their high cleanliness, wear resistance and low particle contamination characteristics provide crucial support for processes such as wafer processing and packaging testing, facilitating the advancement of chip manufacturing towards precision and efficiency.

Wafer processing equipment

E tching chamber/focusing ring: Nitride silicon and alumina ceramics resist plasma erosion, enhancing the uniformity of etching and the stability of the equipment.
Wafer carrier disc: Low thermal expansion ensures the flatness of the wafer during high-temperature processes, suitable for key procedures such as lithography and diffusion.
CMP rollers: High hardness reduces scratches on the wafer surface, improving polishing accuracy.

Packaging and Testing

Ceramic substrates: Alumina and AlN-based substrates have high thermal conductivity and insulation properties, suitable for power semiconductor (IGBT, MOSFET) packaging, enhancing heat dissipation efficiency.Test probe card: Ceramic materials have high rigidity and low deformation, ensuring the stability of high-frequency signal testing.Optical components: High-purity yttria and calcium fluoride ceramics are used in the optical system of EUV lithography machines, resistant to laser damage and with high light transmittance.

Advanced process support

EUV mask substrate: Low thermal expansion ceramics (such as zirconia reinforced alumina) reduce photolithography pattern offset and support nanoscale manufacturing processes.
ALD reactor chamber: Ceramic inner walls resist chemical corrosion, ensuring uniform film deposition, suitable for logic chips and memory manufacturing.
HTCC packaging: Multi-layer ceramic substrates achieve high-density interconnection, suitable for high-frequency modules such as 5G and automotive electronics.

Customizable

We have a wide range of technologies such as material technology, process technology, design technology, measurement/evaluation technology, and integrated processes from materials to products in-house, so we can respond to various customizations. Please feel free to contact us first.
Leave a message
Name*
Email*
Phone*
Message*
We use Cookie to improve your online experience. By continuing browsing this website, we assume you agree our use of Cookie.